http://www.ajnr.org/content/21/1/119 WebJJ Manual of fully automatic cassette-to-cassette handling (CTC) available as an option in two versions: unmasked and masked including barcode reading ... for wafer thickness down to 70 µm and waferbow up to 6mm, carrier solution for thinner wafers JJ Modular chuck design for fast size and configuration conversion (4”, 5”, 6” and 8”) ...
Foup transfer (Auto CTC) – 弘景興業有限公司
WebOct 1, 2013 · To compensate for the temperature effect of idle periods in this work, the … Web– Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) – Wafer Flow Left to right – Cassette included Components to include: ... – Position 1 : Loader (CTC type) – Position 2 : CHCL (Robot Chuck Clean) – Position 3 : PS (Single-Double Sided Porous Silicon bath) – Position 4 : QDR (Quick Dump Rinse) sokeefe fanfiction.net
Current-Voltage characteristics of Cu-TSVs in 50 μm-thick LSI wafer ...
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